S V, A S, Suresh H, s A, p S, MJ N. Simulation and analysis of suspension based single axis mems capacitive accelerometer. ijobas [Internet]. 2022 Dec. 31 [cited 2026 May 1];11(3):107-16. Available from: https://ijobas.pelnus.ac.id/index.php/ijobas/article/view/119